CMP, often called thermal oxidation sprucing, utilizes MP along with chemicals to enhance the MRR and enhance surface high quality [20]. Figure two illustrates the schematic of a standard CMP process [21]. The SiC wafer, which happens to be preset over the carrier, as well as the sprucing pad go https://www.quora.com/profile/Trevor-Flatcher-2/The-Versatile-Applications-of-Silicon-Carbide-Special-Ceramics-in-Modern-Industries-Silicon-carbide-SiC-special-ceram